Real-time scribe metrology

Good scribing is key to high cell efficiency. Scribe widths, pitches, and offsets must be accurately controlled to produce panels with maximum conversion efficiencies, and the coatings must be precisely removed. A new metrology technology has been proven on P1, P2, and P3 scribing tools. NxtGen Scribe 100 systems deliver what the current matrix camera systems cannot—100% scribe metrology, for all scribes, on-line, in real-time. Features include: scribe widths and standard deviations (first third, middle third, last third, and panel composite); scribe offsets; scribe pitch; measurement resolution (±2µm to 5µm); percent of scribe missing (data for each scribe); spacing violations (scribes too close or overlapping or too far apart at any point); measurement of the amount of residual coating left in the scribes (violation of control limits); and, optics remain in focus for warped and bouncing panels or webs at speeds to 30m/min.
 
Dark Field Technologies
www.darkfield.com