Motion system for ultrasonic spray pyrolysis applications

Sono-Tek Corporation has developed an ultrasonic coating system to meet the needs of spray pyrolysis applications, often used in thin film solar cell manufacturing. The FlexiCoat SC features a low oxygen (less than 3% oxygen), fully sealed spray chamber with 1/2" lexan windows for safely spraying solvents at high temperatures. A high temperature heat plate (up to 500° Celsius) is used to heat substrates prior to ultrasonic coating, resulting in uniform pyrolyzed TCO layers such as Indium or Zinc metal compounds onto thin film solar cell substrates. Ultrasonic spray pyrolysis offers several advantages over other deposition methods, such as sputtering or pulsed deposition, as it is less costly, easier to scale, and requires no vacuum and less gas for processing than other coating methods. Coating results have been shown to be uniform, thin, and crack-free, with high transmittance and conductive properties. In addition, this RTP coating technique allows the ability to control desired morphology characteristics.

Sono-Tek Corporation
www.sono-tek.com