Loadlock dry vacuum pumps

Edwards introduces their new iXL250Q and iXL750Q dry pumps. The new pumps, with the addition of the already existing iXL500Q pump, cover the entire range of pump down requirements encountered in the solar manufacturing market sector—from the smaller loadlocks at Generation 4, right up to the largest at Generation 8 or 10. These high-performance pumps are designed to maximize substrate throughput, while minimizing power, footprint, and weight. In addition, no maintenance is required between overhauls. All pumps are “Green Mode” enabled, allowing them to run at lower power during idle periods, while providing the potential to lower annual running costs.

Edwards
www.edwardsvacuum.com